High Speed Surface Micro-Polishing for Spurious Reduction of Small Quartz Crystal Blanks
نویسندگان
چکیده
منابع مشابه
High speed microtribology with quartz crystal resonators.
Quartz resonators in contact with metal-covered spheres have been used to study the tribology of micron-sized metal-metal contacts at high speed (1 m/sec and high frequency (12 MHz), while maintaining a shear amplitude in the nanometer range. The data aquisition is based on ring-down experiments, where the electrical excitation is periodically interrupted and the free decay of the oscillation i...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 2007
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.127.37